多脉冲飞秒激光深小孔的加工  

Hole-Drilling with High Depth-Diameter Ratio Using Multi-Pulse Femtosecond Laser

作　　者：胡梦宁[1] 葛励成 张晋平[1] 陈玉萍(指导)[1] 陈险峰[1] 

机构地区：[1]上海交通大学物理与天文系,区域光纤通信网与新型光通信系统国家重点实验室,上海200240

出　　处：《中国激光》2016年第4期88-94,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(11174204;61125503;61235009;11574208)

摘　　要：利用改进的双温模型理论,表征了多脉冲飞秒激光对厚的金属铝的烧蚀情况,并在实验上予以验证。用有限差分法对飞秒激光在金属铝表面烧蚀过程的温度场进行了三维数值模拟,预测了孔在激光能量密度、脉冲个数、激光束腰半径等不同激光参数作用下的孔径与深度。实验发现,激光能量密度和脉冲个数是影响小孔形貌的主要因素,且多脉冲烧蚀阈值明显低于单脉冲烧蚀阈值。讨论了准贝塞尔光束在最大准直距离内无衍射的特性,分析了贝塞尔光束对于深小孔加工的提升特性。An improved two-temperature model is proposed to characterize the ablation of thick metal aluminum by multi-pulse femtosecond laser, and the model is proved in experiments. In order to achieve hole-drilling with high ratio of depth-diameter, three dimensional numerical simulation to the temperature field in the process of femtosecond laser ablation on metal aluminum surface is carried out. The aperture and depth of hole are predicted with different laser parameters, such as laser energy density, pulse number, laser waist radius and so on. The experiments show that the laser energy density and pulse number are the main factors affecting the morphology of holes, and the multi-pulse ablation threshold is much lower than that of the single-pulse one. The non-diffraction characteristics of aquasi Bessel beam within the maximum collimating distance are discussed and the enhancement on hole-drilling processing of Bessel beams is analyzed.

关 键 词：激光光学 激光加工 高深径比 双温模型 贝塞尔光束 

分 类 号：TN23[电子电信—物理电子学]