绝对式容栅测量技术浅析  

A brief analysis of absolute capacitive grating measurement technology

作　　者：王孝[1] 王玉花[1] 谢行[1] 

机构地区：[1]北京航天试验技术研究所,北京100074

出　　处：《传感器世界》2016年第4期25-28,共4页Sensor World

摘　　要：数显量具在各种制造业,尤其是传统机械制造业中,正以强劲的势头替代传统的机械量具和气动量具,成为生产现场主导测量器具。容栅数显位移传感技术和产品以其结构简单、对使用环境要求不高、测量速度快、能耗低等优点得到最为广泛的应用。介绍了相对式容栅数显量具的传感器结构、测量原理和相应的电路结构,指出相对式容栅测量系统使用过程中存在的问题,比较了绝对式容栅和相对式容栅的优缺点。介绍了绝对式容栅传感器和电路的结构,最后指出了国外绝对式容栅技术现状,以及国内绝对式容栅技术存在的差距。Digital-display measuring tools are gradually taking over the traditional mechanical measuring tools and gas dynamic measuring tools, and become dominant ones in a variety of manufacturing industries especially the traditional machinery manufacturing industry. Capacitive-grating digital-display displacement sensing technology and products are widely used because of their simple structure, few requirements for environment, fast measuring speed, and low power consumption. In this paper, the sensor structure, measuring principle and corresponding circuit of relative capacitive grating digital display measuring tool are introduced at first. The problems of the relative systems existing in practical application are pointed out, and the advantages and disadvantages of the absolute and the relative systems are compared. Then the absolute capacitive grating sensor and circuits are introduced. Finally, the development of absolute capacitive grating technology abroad are introduced, and the technology gap of domestic products are analyzed

关 键 词：数显量具 相对式容栅 绝对式容栅 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]