可刚性固定MEMS矢量水听器的设计  

Design of a Rigidly Mounted MEMS Vector Hydrophone

作　　者：王续博 张国军[1,2] 郭楠[1,2] 郭静[1,2] 张文栋[2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2016年第5期310-315,共6页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划(863计划)资助项目(2013AA09A414);国家自然科学基金资助项目(61127008;51205374);山西省青年科技研究基金资助项目(2012021013-3)

摘　　要：针对传统矢量水听器在实际应用中需要辅助弹性悬挂,不便于工程应用的问题,设计并制造了一种具有低加速度灵敏度可刚性固定的差分型MEMS矢量水听器。介绍了该水听器的工作原理,制作了试验样机。搭建实验平台对样机进行测试,结果表明:500 Hz时声压灵敏度为-185 dB(0dB参考值1 V/μPa),频带内指向性凹点深度大于30 dB,加速度灵敏度相对于普通型矢量水听器下降20 dB(0dB参考值1 V/g)。理论与实验证明该差分型MEMS矢量水听器可以实现刚性固定的目的,具有广泛的工程应用前景。Considering that it is inconvenience to suspend the traditional vector hydrophone with springs for the practical engineering application,a differential rigidly mounted MEMS vector hydrophone with low acceleration sensitivity was designed and fabricated.The working principle of the hydrophone was introduced,and the prototype of the vector hydrophone was fabricated.The experimental platforms were set up to test the prototype.The results show that the acoustic pressure sensitivity is-185 dB（0dB reference value 1 V/Pa）at 500 Hz,the depth of directive concave points is larger than 30 dB and the acceleration sensitivity of the differential MEMS vector hydrophone reduces 20 dB（0dB reference value 1 V/g）compared with that of the ordinary type vector hydrophone.The theoretical and experimental results show that the differential MEMS vector hydrophone can achieve the purpose of rigid fixation and has broad engineering application prospects.

关 键 词：微电子机械系统(MEMS) 矢量水听器 差分结构 刚性固定型 加速度灵敏度 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]