基于渐变结构的矩形腔表面波等离子体源仿真和设计  

Simulation and Design of Rectangular Cavity Surface Wave-Excited Plasma Source Based on Grading Structure

作　　者：林毅[1] 张文聪[1] 肖玮[1] 黄卡玛[1] 

机构地区：[1]四川大学电子信息学院,成都610064

出　　处：《微波学报》2016年第2期59-62,76,共5页Journal of Microwaves

摘　　要：目前,大尺寸矩形腔表面波等离子体源的设计中,利用缝隙辐射器耦合微波能量时,绝大部分都是在波导的宽边开缝,这在一定程度上限制了电场均匀性的进一步提高。本文提出了一种基于渐变结构的缝隙辐射器设计,即扩展波导宽边同时压缩窄边形成具有稳定模式的宽边更宽窄边更窄的结构。设计了加载短路面的缝隙阵列耦合结构并利用时域有限差分(FDTD)方法计算了电子密度为1.79×10^(18)m^(-3)、碰撞频率为3×10~8Hz时石英-等离子体分界面上电场幅度分布,并与传统波导开缝结构对比,实现了电场均匀性的有效提升,并得到了稳定的表面波模式。During the design of large-area rectangular cavity surface wave-excited plasma sources,most researchers are interestedin the slot antennas made in the wave-guide broad-wall. This limits the improvements of the homogeneity of electric field. This paperproposes a coupling design based on grading structure,which means that expanding in the broad-wall direction and compressing in thenarrow-wall direction with a wider wave-guide loaded with short-plane. Slot antennas array is designed for coupling microwave energyand the model with FDTD method calculating Maxwell equations is compnted. Comparing the results of old structures with the newones it is found that the latter can realize improvement of homogeneity and stable surface wave modes on the quartz-plasma interfacewhen the electron density is 1.79×10-（18）m-（-3） and collision frequency is 3×10-8Hz.

关 键 词：表面波等离子体 大尺寸 渐变结构 缝隙波导 均匀性 

分 类 号：O53[理学—等离子体物理]