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作 者:董方营 张立春[1] 王晓慧[1] 林国琛[1] 赵风周[1]
机构地区:[1]鲁东大学物理与光电工程学院,山东烟台264039
出 处:《鲁东大学学报(自然科学版)》2016年第2期135-138,共4页Journal of Ludong University:Natural Science Edition
基 金:国家自然科学基金(11504155);山东省自然科学基金(ZR2014AM027;ZR2015PA011);山东省高等学校科技计划项目(J14LJ04);鲁东大学科研基金项目(LY2014006)
摘 要:采用脉冲激光沉积技术在石英衬底上制备了SnO_2(40 nm)/Au(8 nm)/SnO_2(40 nm)三层薄膜结构.分别利用扫描电子显微镜、紫外可见光分光光度计、四探针电阻测试仪等研究了制备温度对多层薄膜的形貌、结构和光电性能的影响.结果表明,制备温度对SnO_2/Au/SnO_2透明导电薄膜的光电性能有较大影响,随着衬底温度的升高,三层膜的品质因数逐渐下降.当制备温度为20℃,SnO_2/Au/SnO_2在可见光区(400~800 nm)的平均透过率为69.7%,面电阻为6.8Ω/sq,薄膜具有最佳品质因数3.96×10^(-3)Ω^(-1).The SnO2 (40 nm)/Au ( 8 nm)/SnO2 (40 nm) tri-layer transparent conducting oxide films have been fabricated on quartz glass by pulsed laser deposition (PLD). The influences of prepared temperature on the optical and electrical properties of SnO2/Au/SnO2 tri-layer films has been investigated by field emission scanning electron microscopy ( FE-SEM), ultraviolet-visible-near infrared (UV-vis-NIR) spectrophotomcter, four-point probe technique and hall measurement, respectively. The substrates temperature influences the optical and electrical properties of SnO2/Au/SnO2 tri-layer films seriously. With the substrate temperature increasing,the figure of merit of the tri-layer film decreased. When the temperature is 20℃ ,the SnO2/Au/SnO2 tri-layer film has the best figure of merit, which is 3.96×10^-3Ω^-1 , with average transmittance of 69.7% in visible light range (400 -800 nm) and sheet resistance of 6. 8 Ω/sq..
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