刻蚀转移掩蔽膜用单分散SiO_2纳米小球制备  

Preparation of monodispersed spherical silicon dioxide particles used as pattern transfer etching mask

作　　者：王影[1] 王权岱[1] 肖继明[1] 王莉[2] 李鹏阳[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048 [2]西安交通大学机械制造系统工程国家重点实验室,西安710049

出　　处：《功能材料》2016年第5期212-216,共5页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(51375381);陕西省2015年科技统筹创新工程计划资助项目(2015KTCQ01-36)

摘　　要：在无水乙醇中以氨作催化剂,正硅酸乙酯为硅源,通过传统溶胶-凝胶工艺制备单分散SiO_2球形颗粒,通过扫描电子显微镜(SEM)进行研究各种反应条件正硅酸乙酯、氨和水的浓度、水解温度等对SiO_2小球颗粒大小和形貌的影响。结果显示,正硅酸乙酯、氨水浓度增加而SiO_2小球粒径增大;去离子水量的增加而SiO_2小球粒径变小;温度升高团聚现象明显减少;陈化时间影响团聚,但团聚现象是可逆变化。讨论了SiO_2小球颗粒在不同反应条件下的形成机理,以及由于SiO_2纳米小球的表面能高、稳定性差、使用中易产生团聚现象原因及解决的方法。. In this work, the monodispered spherical silicon dioxide particles have been prepared through the tra-ditional sol-gel process with ammonia as catalyst and with TEOS as silica source in anhydrous ethanol. The in-fluences of various reaction conditions involving TEOS concentration, ammonia concentration and water concen-tration on the particle size and morphology have been investigated through the field emission scanning electronmicroscope. Experimental results show that the diameter of the spherical SiO2 particle increases with the in-crease of TEOS concentration and ammonia concentration and decreases with the increase of deionized waterconcentration. Besides, the higher temperature reduced agglomeration significantly and aging time influenceag-glomeration. However, the agglomeration due to aging is reversible through agitation in ultrasonic set-up. Theformation mechanism of silicon dioxide particles under different reaction conditions has been discussed. Finally,the agglomeration due to the high surface energy and poor stability of the nano-SiO2 particles is analyzed emplo-ying DLVO theory and the preliminary solution is proposed.

关 键 词：单分散 SiO2小球 制备 团聚现象 

分 类 号：TH145.11[一般工业技术—材料科学与工程]