点光源下的Talbot效应在阴影叠栅中的应用  

Shadow Moiré Using Talbot Effect Under Point Light Illumination

作　　者：艾永旭 周翔[1,2] 杜虎兵[3] 郭家玉[1] 杨涛[1] 赵磊[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049 [2]西安交通大学馥莉食品装备工程与科学学院,陕西西安710049 [3]西安工业大学机电工程学院,陕西西安710021

出　　处：《光学学报》2016年第4期139-146,共8页Acta Optica Sinica

基　　金：国家自然科学基金(51105301);国家973计划(2015CB057402);陕西省自然科学基础研究计划(2015JM5190)

摘　　要：传统的阴影叠栅轮廓术的测量深度十分有限。根据点光源照明下Talbot自成像的空间分布规律,提出将点光源下的Talbot效应应用于阴影叠栅三维轮廓测量的方法。推导点光源模型下阴影叠栅测量系统中相机接收到的光强随物体到光栅距离变化的数学表达式。数值模拟和实验表明,相对于传统的阴影叠栅轮廓术,利用Talbot效应会大大增加阴影叠栅轮廓术的测量深度。分别使用文中所提出的方法和传统的阴影叠栅轮廓术对同一物体表面进行测量,两次测量结果之差在±5μm内。说明将点光源下的Talbot效应应用于阴影叠栅轮廓测量能够准确地反映物体表面的三维形貌。The measurement depth of traditional shadow moire profilometry is very limited. According to the space distribution of Talbot self-imaging under the illumination of point light source, a new technique using Talbot effect under point light illumination for shadow moire profilometry is proposed. An exact mathematical formula describing the relationship between the intensity of shadow moire fringes under the point light illumination and the distance between measured object and gratings is derived. The numerical simulation and experiment show that the measurement depth of the shadow moire profilometry is increased notably by using the Talbot effect compared with the traditional shadow moire profilometry. Respectively, the proposed method and the traditional shadow moire method are used to measure the surface of the same object, the difference of the results obtained by the two methods is within ±5 μm. Thus the validity of the proposed technique is proved. The proposed method can reflect the three- dimensional morphology of object surface accurately.

关 键 词：测量 光学三维测量 阴影叠栅轮廓术 菲涅耳-克希霍夫积分 TALBOT效应 

分 类 号：O439[机械工程—光学工程]