偏振调节的飞秒激光三光束干涉制备微纳复合周期结构  

Complex Peiriodic Micro-Nanosturctures Fabricated by PolarizationControlled Interference of Three Femtosecond Laser Beams

作　　者：贾鑫[1] 

机构地区：[1]上海电机学院数理教学部,上海201306

出　　处：《上海电机学院学报》2016年第2期117-120,共4页Journal of Shanghai Dianji University

基　　金：国家自然科学基金项目资助(11104178);上海市教育委员会科研创新项目资助(14YZ156);上海电机学院基础学科建设项目资助(12XKJC01)

摘　　要：飞秒激光照射材料表面,能够诱导远小于激光波长的纳米周期结构。采用飞秒激光三光束干涉技术,并简单地旋转偏振片调节三束光的偏振方向,在ZnO晶体表面制备了3种不同类型的微纳复合周期结构。该结构由长周期微米结构以及短周期纳米结构组成。理论计算结果表明,光束间不同的偏振组合能够导致不同的光强及偏振分布,这很好地解释了实验结果。该方法使偏振成为影响干涉的一个重要因素,在激光纳米加工具有潜在的应用价值。Periodic nanostructures can be induced after irradiation of a femtosecond laser on the material surface.Three types of complex periodic micro-nanostructures on ZnO crystal are fabricated by three-beam interference of femtosecond laser after rotation of polarization plates to adjust polarization orientations.The micro-nanostructures are composed of long-periodic microstructures and shortperiodic nanostructures.Theoretical calculation indicates that the different polarization combinations lead to distinct interferential intensity patterns and polarization patterns.They agree well with experimental results.This method makes polarization an important factor in interference,and has potential applications in femtosecond laser nanofabrication.

关 键 词：飞秒激光 三光束干涉 偏振调节 微纳复合周期结构 

分 类 号：O436.3[机械工程—光学工程]