基于波数扫描干涉的表面轮廓测量  

Profilemetry measurement based on wavenumber scanning interferometry

作　　者：何艳敏[1] 谢创亮 许卓明[1] 鲍鸿[1] 叶双莉[2] 周延周[1] 

机构地区：[1]广东工业大学自动化学院,广州510006 [2]武汉大学微电子与信息技术研究院,武汉430072

出　　处：《激光技术》2016年第3期392-396,共5页Laser Technology

基　　金：国家自然科学基金资助项目(51371129;11174226);广东省自然科学基金资助项目(1414050002003);广州市科技计划资助项目(2014J4100203)

摘　　要：为了高精度测量被测物体表面3维轮廓,采用半导体激光器波数扫描干涉的方法,对激光波数扫描干涉进行了理论分析和实验验证。在迈克尔逊干涉系统的参考端引入一个光楔,通过2-D傅里叶变换提取光楔干涉图像的相位,在线检测激光器输出波数变化,最后对所有时间分辨干涉图像序列进行随机采样傅里叶变换,还原被测物体表面3维轮廓。结果表明,轮廓测量精度达到±6.7nm。该方法特别适合于机械零件的质量检验。In order to measure 3-D profile of a sample with high accuracy , wavenumber-scanning interferometry was used . An optical wedge was used as reference terminal of a Michelson interferometer system .The phases of wedge interference image were extracted by 2-D Fourier transform.The changes of output wavenumber were detected on line .Finally, all the time-resolved interferometry image sequences were sampled by Fourier transform random .The 3-D contour of object surface was restored with high precision.The profile of a sample object was constructed with the resolution of ±6.7nm.The proposed method is particularly suitable for quality inspection of mechanical parts .

关 键 词：激光技术 轮廓测量 波数扫描 半导体激光器 随机采样傅里叶变换 

分 类 号：TN247[电子电信—物理电子学]