电子调制的激光相干粗糙度测量技术研究  

Study on measuring technology of roughness based on electronic modulation laser coherence

作　　者：王辉林[1] 董元丽 

机构地区：[1]山东理工大学机械工程学院,淄博255049

出　　处：《激光技术》2016年第3期447-450,共4页Laser Technology

摘　　要：表面粗糙度对机械产品的使用性和可靠性有重要影响。为了实现远距离测量零件表面粗糙度,采用基于激光多普勒效应的电子直接调制激光的相干法进行了表面粗糙度测量。应用激光多普勒效应克服了工作距离的影响;使用电子直接调制提高了测量速率,降低了成本;采用相干法实现了交流锁相放大,有效控制了系统噪声。经过测量过程的统计误差控制、标定和比较可知,所设计的系统测量不确定度可达1‰。结果表明,该技术具有远距离测量且精度高的特点,对表面粗糙度的测量具有一定的指导意义。The reliability and the usability of mechanical products largely depend on their surface roughness .In order to achieve long-distance measurement of surface roughness of mechanical parts , a method of electronic direct modulation laser coherence based on laser Doppler effects was put forward to measure the surface roughness .The application of laser Doppler effects can reduce influence of working distance .The speed of measurement was improved and the cost was reduced by using electronic direct modulation method .By using coherent method , alternative phase lock amplification was realized and the system noise was effectively controlled too .The experimental results show that the uncertainty degree of the measurement system can be reached 1‰after controlling the statistical error and calibrating the experiment data during measurement process .The study has a certain guiding significance on the measurement of surface roughness .

关 键 词：激光技术 表面粗糙度 直接调制 不确定度 

分 类 号：TN247[电子电信—物理电子学]