基于FPGA的高精度薄膜宽度控制仪设计  

Design of high precision thin film width control instrument based on FPGA

作　　者：仲骥 周国平[1] 黄峰[1] 邢苏 何碧漪 

机构地区：[1]南京林业大学信息科学技术学院,江苏南京210037

出　　处：《传感器与微系统》2016年第5期94-96,共3页Transducer and Microsystem Technologies

摘　　要：为了达到薄膜生产指标,利用线阵电荷耦合器件(CCD)进行数据采集测量,反射式红外光电传感器作为反馈控制,并以现场可编程门阵列(FPGA)为核心控制器,设计出一种高精度薄膜宽度控制仪。该装置能在精确检测出生产薄膜的宽度同时,将其与生产要求的设定值进行比较,实现对充气开关进行控制。通过实验分析,该系统提高了整个生产过程的精度和可靠性。In order to achieve index of thin film production, using linear array CCD to carry out data acquisition and measurement, reflective infrared photoelectric sensor as feedback control, and field programmable gate array （FPGA）is used as core controller,design a high precision thin film width control instrument. The device can detect width of the produced thin film accurately, at the same time, compare it with setting value of production requirements, then realize pneumatic switch control. Through experimental analysis, the system improves precision and reliability of the whole production process.

关 键 词：线阵电荷耦合器件 现场可编程门阵列 高精度 可靠性 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]