聚合物多模干涉微环谐振器的设计与分析  

Design and Analysis of Polymer Microring Resonator With MMI Coupler

作　　者：吕桓林[1,2] 韩秀友[2] 武震林 梁宇鑫[2] 赵明山[2] 

机构地区：[1]大连工业大学信息科学与工程学院,辽宁大连116034 [2]大连理工大学物理与光电学院,辽宁大连116024

出　　处：《激光杂志》2016年第5期10-14,共5页Laser Journal

基　　金：国家国际科技合作专项项目(2014DFG32590);国家高技术研究发展863计划(2012AA040406);辽宁省自然科学基金(201402002)

摘　　要：聚合物基微环谐振器作为低成本和易制备的集成光子器件受到了广泛的关注。利用多模干涉的自映像理论设计了微环谐振器,在直波导和环之间以2×2多模干涉耦合实现50∶50的分光比。在输入/输出波导和多模干涉耦合区连接部分引入了锥形结构以提高性能。分析了TE/TM波多模干涉区制备容差对附加损耗和均衡度的影响。分析了不同残留层厚度下正脊型波导的弯曲损耗。进一步仿真了半径为200μm微环的光谱响应。仿真结果表明设计极大的提高了微环的性能。Polymer-based microring resonators（ MRR） have attracted extensive attentions as low-cost and easy-fabrication of integrated-photonic devices.The self-imaging properties of multimode interference（ MMI） have been used to design MRR,that uses a 2×2 MMI coupler having a 50： 50 splitting ratio between the ring and bus waveguide.In this design,taper structures are applied at the junction between input / output waveguides and multimode section for better performance.The excess loss and imbalance in MMI coupler with fabrication tolerances are analysed for both TE（ transverse-electric） and TM（ transverse-magnetic） modes. The bend losses of polymer rib waveguide with different residual layer dimensions are analysed.Futhermore,the spectral response of the resonator resonances with a radius of 200μm is simulated.Numerical simulations show that the present design improves the performances of the MRR greatly.

关 键 词：多模干涉耦合器 微环谐振器 束传播方法 正脊型 

分 类 号：TN252[电子电信—物理电子学]