PSD位置测量系统在波荡器磁场测量中的应用  

The application of position measuring system based on PSD in undulator magnetic field measurement

作　　者：王晓勋[1,2] 王宏飞[1] 周巧根[1] 朱亚[1] 

机构地区：[1]中国科学院上海应用物理研究所嘉定园区,上海201800 [2]中国科学院大学,北京100049

出　　处：《核技术》2016年第5期13-17,共5页Nuclear Techniques

基　　金：国家自然科学基金(No.11175238)资助~~

摘　　要：位置敏感探测器(Position Sensitive Detector,PSD)是一种基于横向光电效应(x和y方向)的光电位置敏感器件,可直接探测到入射光斑的能量中心位置,在波荡器磁测中可用于获得霍尔探头测量过程中的横向位置变化。为了在狭小或封闭空间内实现对波荡器(尤其是真空内波荡器)磁场进行高精度的测量,我们设计并搭建了测试系统,对导轨直线度(x和y方向)进行了测量。实验结果表明,该位置测量系统具有5μm的测量精度,可以满足霍尔探头在波荡器磁测过程中的位置精度要求。Background： A set of high-precision magnetic field measuring system can guarantee the undulator magnetic field optimization and meet the measurement requirements.Purpose：We can operate magnetic field measurement in an enclosed space and construct a set of measuring system to obtain the coordinates of the Hall sensor. Methods： The base is designed using Solid Edge and data acquisition program can be written by LabVIEW. Position sensitive detector （PSD） is used to acquire the exact position coordinates of Hall probe. At last, we create points and plot by MATLAB to analyze the data change.Results： The position measuring system based on PSD accurately reflects the position changes and the fitting curve shows the guide rail variation trend. Conclusion： The measurement accuracy can reach 5μm.PSD has an advantage over optical system, which can be widely used in measurements of position and small displacement.

关 键 词：位置敏感探测器 光阑 真空内波荡器 磁场测量 数据采集 

分 类 号：TL506[核科学技术—核技术及应用]