基于高精度电子水平仪的平面镜水平调整方法  

High precision electronic level meter based plane mirror horizontal adjustment method

作　　者：鲁云峰[1,2,3] 贺青[2,3] 曾涛[1,3] 李正坤[2,3] 张钟华[2,3] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,黑龙江150001 [2]中国计量科学研究院,北京100029 [3]国家质检总局电学量子基准重点实验室,北京100029

出　　处：《仪器仪表学报》2016年第4期744-750,共7页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(91536224;51477160)资助项目

摘　　要：本文提出一种基于高精度电子水平仪实现平面镜反射面水平调整的方法,利用平面镜水平基准作参考进而实现激光干涉仪测量光束竖直方向准直的目的。利用该方法搭建的实验装置通过最短的传递环节将竖直轴向标准传递至平面镜反射面的水平调整上,建立数学模型证明了该方法可行性,并给出了仿真结果;通过实验及分析,本文搭建的实验装置竖直轴向标准精度小于28μrad,传递至平面镜的反射面上,实验得到平面镜水平倾角小于30μrad,从而实现一种平面镜反射面作为参考级水平基准的调整;最后设计实验应用于光束竖直方向准直调整,并实现与酒精液面参考的直接比对,实验证明本文搭建的平面镜水平调整装置与传统的酒精液面参考水平特性高度吻合。A plane mirror horizontal adjustment method based on the high accurate electronic level meter is proposed. The plane mirror horizontal standard is used to align the laser beam of the interferometer along the vertical direction. According to the method, the device is built, which can realize the plane mirror horizontal adjustment using a reference of vertical standard calibrated by level meter. This method is proved with a mathematic model. The simulation results are given. According to the experiment, the accuracy of the vertical standard is below 28μrad. The result of the plane mirror inclination is below 30 μ rad. The adjusted plane mirror can be used as a refer- ence of horizontal standard, which can be applied in the beam alignment. The experiment is designed to compare our plane mirror refer- ence to the alcohol liquid reference directly, which shows high consistency between two methods.

关 键 词：电子水平仪 竖直轴向标准 平面镜水平参考 液面参考 

分 类 号：TH74[机械工程—光学工程]