外差激光干涉仪非线性误差分析及测量  

Analysis and Measurement of the Nonlinear Errors in Heterodyne Interferometers

作　　者：乐燕芬[1] 句爱松[1] 

机构地区：[1]上海理工大学上海市现代光学系统重点实验室,上海200093

出　　处：《激光与光电子学进展》2016年第5期203-212,共10页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51075280)

摘　　要：对外差激光干涉仪中的非线性误差理论进行了综述,着重分析了一阶、二阶非线性误差的形成机理、非线性误差的大小及表现形式,并对非线性误差检测和补偿方法的研究进展进行了详细阐述和分析,指出了各类方法的应用特点,为开展这一方向的后续研究提供理论基础。The nonlinear errors theory in heterodyne interferometer is summarized, in which the formation mechanism, size and expressive form of first-order and second-order nonlinear errors are analyzed emphatically. The research progress of nonlinear error detection and compensation method is elaborated in detail, and the application characteristics of various methods are pointed out. It provides a theoretical foundation for further research on the nonlinearity to improve the accuracy of heterodyne interferometer.

关 键 词：测量 非线性误差 外差干涉 误差分析 

分 类 号：TH744.3[机械工程—光学工程]