红外仿真系统短中波能量调节滤波器的研制  

Development of Short-Medium Wave Energy Regulation Filter in Infrared Simulation System

作　　者：付秀华[1] 陈志航[1] 张静[1] 熊仕富[1] 范家晨 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《中国激光》2016年第5期178-186,共9页Chinese Journal of Lasers

基　　金：吉林省重大科技攻关专项(20140203002GX)

摘　　要：红外仿真作为一种新型仿真手段,以其仿真可信度高、重复性好、实验成本低等优点在军事领域得到越来越广泛的应用。为满足红外仿真系统的要求,调节红外短、中波段能量的比例,对系统中的滤波器进行研制。选择Ge和SiO作为高低折射率材料,利用Ge在可见光和近红外的吸收特性,通过叠加膜堆展宽反射带,采用TFCalc软件的变度量（variable metric）法对双波段能量调节、超宽截止带滤波器进行优化设计。并针对不同材料的特性,分别采用电子束蒸发和电阻蒸发技术,制备了相应的滤波器。通过逆向工程方法分析消光系数对透射率的影响,解决了膜系透射率偏低的问题。制备的滤波器在300-1900nm和5500-7500nm波段透射率小于1%,在2000-2500nm波段平均透射率为90.6%,在3700-4800nm波段平均透射率为35.7%,满足该系统环境测试要求。As a new means of simulation,the infrared simulation is widely used in the military field for its high simulation credibility,good repeatability and low testing cost.To satisfy the requirements for infrared simulation system and to adjust the energy proportion of short-medium wave bands,we develop the filters.Using Ge and SiO as coating materials because of the absorption characteristic of Ge in the visible and near-infrared wave band,superimposing two film stacks to broaden the reflection band,we design and optimize a two-band energy regulation and wide band cut filter by using variable metric method of TFCalc software.According to the characteristics of different materials,we make the corresponding filter by using electron beam evaporation and resistance deposition techniques.By using reverse engineering method,we analyze the effect of extinction coefficient on transmittance and solve the problem of low transmittance.Transmittance of the filter is less than 1% at 300 nm to 1900 nm and5500nm to 7500 nm,90.6% at 2000 nm to 2500 nm,and 35.7% at 3700 nm to 4800 nm,which meets environmental testing requirements of the simulation system.

关 键 词：薄膜 滤波器 膜系设计 吸收 红外仿真 

分 类 号：O484[理学—固体物理]