辛基三甲氧基硅烷改性SiO_2疏水减反膜的制备  

Preparation of Octyltrimethoxysilane Modified SiO_2 Hydrophobic Antireflective Coating

作　　者：牛彦彦[1] 王晓栋[2] 姚兰芳[1] 田冰涛[2] 冯建斌[1] 曹媛媛[2] 张清华[3] 沈军[2] 

机构地区：[1]上海理工大学理学院,上海200093 [2]同济大学物理科学与工程学院上海市特殊人工微结构材料与技术重点实验室,上海200092 [3]成都精密光学工程研究中心,成都610041

出　　处：《无机材料学报》2016年第5期499-504,共6页Journal of Inorganic Materials

基　　金：国家自然科学基金青年基金(11304228);国家自然科学基金NSAF联合基金(U1230113);2013年度上海航天科技创新基金(SAST201370);上海市教育发展基金会和上海市教育委员会"晨光计划"(14CG19);中央高校基本科研业务费专项资金~~

摘　　要：以正硅酸乙酯为前驱体,氨水为催化剂制备标准SiO_2溶胶,然后在回流前后分别对普通SiO_2溶胶添加适量的辛基三甲氧基硅烷(OTMS)进行修饰,得到OTMS改性SiO_2溶胶。用未进行OTMS修饰、回流前修饰和回流后修饰的溶胶分别制备减反膜,并使用傅里叶变换红外光谱仪、核磁共振波谱仪、紫外–可见–近红外分光光度计、原子力显微镜和接触角测试仪对薄膜的结构和性能进行表征。结果表明:回流前添加OTMS修饰剂制备的改性SiO_2减反膜具有最优异的耐潮湿环境稳定性能,最高透过率可达99.7%以上;与水的接触角达到120°,在潮湿环境中放置4 w后,透过率只下降0.23%。The standard SiO_2 sol was prepared by sol-gel process using tetraethylorthosilicate（TEOS） as precursor and ammonia as catalyst. Octyltrimethoxysilane（OTMS） was added into the standard SiO_2 sols before and after refluxing to obtain different organosilane modified silica sols, respectively. Silica antireflective（AR） coatings were then prepared from different SiO_2 sols by dip-coating method. The optical and structural properties of the AR coatings were characterized by Fourier transform infrared spectroscopy, liquid-state 29 Si NMR, UV-Vis-NIR spectrometer, atomic force microscope and water contact angle measurement. The results show that the AR coating prepared from OTMS modified before refluxing has the best moisture-resistant performance. The coated glass substrate obtains a high peak transmittance of 99.7%, with water contact angle of 120°. After been placed in a humid environment for 4 w, the transmittance of SiO_2 coatings modified before refluxing is decreased only by 0.23%.

关 键 词：溶胶–凝胶 减反膜 辛基三甲氧基硅烷 

分 类 号：O484[理学—固体物理]