栅条状和蜂窝状结构结势垒肖特基整流器(JBSR)性能对比  

Gridline and Honeycomb Structure of Junction Barrier Schottky Rectifier(JBSR)Performance Comparison

作　　者：高桦[1] 柴彦科 刘肃[1] 

机构地区：[1]兰州大学物理科学与技术学院微电子所,兰州730000

出　　处：《电子器件》2016年第2期258-263,共6页Chinese Journal of Electron Devices

基　　金：甘肃省科技支撑计划项目(1204GKCA062);甘肃省功率半导体及光电器件工程实验室创新能力建设项目(甘发改投资[2014]813号)

摘　　要：栅条状和蜂窝状平面结构的结势垒肖特基整流管(JBSR)的不同之处在于其沟道有效面积的大小不同。从这两种平面结构的结势垒肖特基整流管(JBSR)的工艺和电学特性来看,适当的增大JBSR器件的沟道有效面积,可使JBSR器件的击穿电压得到提高。蜂窝状平面结构JBSR器件的沟道有效面积较栅条状器件的小,开启电压低,但反向耐压不如栅条状平面结构JBSR器件,这可能是因为蜂窝状器件的P+区的缺陷较于栅条状结构器件的多,同样器件的I-V特性也与结构参数密切相关。Gridline and honeycomb planar structure Junction Barrier Schottky Rectifier（JBSR）is different in the dif？ferent sizes of its channel effective area. From the two planar structure of Junction Barrier Schottky Rectifier of the process and electrical characteristics,the appropriate to increase the channel effective area of Junction Barrier Schottky Rectifier,the breakdown voltage of Junction Barrier Schottky Rectifier might be improved. The channel ef？fective area of the honeycomb planar structure of Junction Barrier Schottky Rectifier is smaller than the gridline structure,lower forward voltage,but not as better as the reverse breakdown voltage of the gridline planar structure Junction Barrier Schottky Rectifier,this may be because the P＋region defects in the honeycomb structure of Junc？tion Barrier Schottky Rectifier are more than the gridline structure devices,likewise closely related to the I-V char？acteristic and structure parameters of the device.

关 键 词：结势垒肖特基整流器(JBSR) 沟道有效面积 电学特性 栅条形 蜂窝状 

分 类 号：TN315.2[电子电信—物理电子学] TN314.2