MEMS微发火器件研究现状  

Research Status of MEMS Micro Initiators

作　　者：陈晓勇[1,2] 董帅 熊继军[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030027 [2]中北大学化工与环境学院,太原030051 [3]晋西工业集团,太原030027

出　　处：《微纳电子技术》2016年第6期381-386,393,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(青年项目)资助项目(51505435);中国博士后基金资助项目(2014M551061)

摘　　要：首先分析了国内外关于微电子机械系统(MEMS)微发火器件的研究报道;接着从与MEMS微加工工艺兼容性、发火输出、安全性等角度对比了装药型微发火器件、爆炸箔基微发火器件、多孔硅基微发火器件、含能金属薄膜基微发火器件和半导体桥基微发火器件的特点、研究现状和前沿方向,发现含能金属基和半导体桥基微发火器件两者前景最好,其中含能金属基微发火器件因具有发火输出大、与MEMS工艺兼容性好的优点受到广泛关注,而半导体桥基微发火器件因换能传热效率高、微加工兼容性高受到认可;最后指出改善微发火器件换能传热效率、降低器件无用能量散失和提高发火器件所加载的含能材料能量密度是微发火器件研究的主要方面。The research reports on micro-electromechanical system（MEMS） micro initiator are analyzed firstly.Then,the feature,research status and forefront of micro initiating devices based on the chemical pyrotechnic,exploding foil,porous silicon,reactive metal film and semiconductor bridge are compared from the points of the compatibility with MEMS microfabrication,fire output energy,safety and so on.It is found that the micro initiators based on the reactive metal film and semiconductor bridge are the most promising,the reactive metal film based micro intiator has high energy output and good compatibility with MEMS process,while the semiconductor bridge based micro intiator has outstanding heat transfer efficiency and compatibility with MEMS process.Finally,it is indicated that improving heat transfer efficiency,reducing energy loss and enhancing energy density of energetic materials are the main aspects of the research on the micro initiator.

关 键 词：微电子机械系统(MEMS) 微发火器件 爆炸箔 多孔硅 含能金属 半导体点火桥 

分 类 号：TH703[机械工程—仪器科学与技术]