亚微米SiO_2颗粒的制备及影响因素分析  

Preparation and Influence Factor Analysis of Sub-Micron SiO_2 Particles

作　　者：蔡允高[1] 李炘琪 董盈红[1] 

机构地区：[1]保山学院理工学院,云南保山678000

出　　处：《微纳电子技术》2016年第6期415-419,共5页Micronanoelectronic Technology

摘　　要：以正硅酸乙酯（TEOS）为硅源,采用改进的Stober法（在反应体系中添加电介质NaCl）,获得了260~960 nm尺寸的亚微米SiO_2颗粒,通过扫描电镜（SEM）对其球形度、单分散性等进行表征分析,比较分析了TEOS和无水乙醇混合液的添加方式（分别为迅速加入和逐滴加入）及氨水用量对SiO_2颗粒形貌和粒径等方面的影响。结果表明,TEOS和无水乙醇混合液的添加方式为逐滴加入时,可以在一定范围内有效避免添加方式为迅速加入时导致的SiO_2颗粒粒径双尺寸分布现象,同时,SiO_2颗粒的球形度也更好。另外,随着氨水用量的增多,SiO_2颗粒的粒径逐渐增大,但是当氨水用量过多或过少时,SiO_2颗粒表现出明显的黏接现象,球形度较差。With the tetraethyl orthosilicate（TEOS） as the silica source,the sub-micron SiO_2 particles with the size range of 260-960 nm were obtained by the modified Stober method（adding the dielectric Na Cl in the reaction system）.And the sphericity and monodispersity were characterized by using the scanning electron microscopy（SEM）.Besides,the effects of the addition manner of the TEOS and anhydrous ethanol mixture（quick addition and drop by drop addition） and the ammonia amount on the morphology and diameter of the SiO_2 particles were compared and analyzed.The results show that when the addition manner of the TEOS and anhydrous ethanol mixture is drop by drop addition,compared with the quick addition manner,the pheno-menon of the double particle sizes of the SiO_2 particle size distribution can be avoid effectively within a certain extent,and simultaneously the sphericity is better.On the other hand,the size of the SiO_2 particles increases gradually with the increase of the amount of ammonia,while SiO_2 particles with obvious adhesion and worse sphericity appear when the amount of ammonia is too much or too little.

关 键 词：亚微米SiO_2颗粒 添加方式 氨水 球形度 单分散性 

分 类 号：TN304.21[电子电信—物理电子学]