Structure and mechanical properties of nc-TiC/a-C:H nanocomposite films deposited by filtered cathodic arc technique  

作　　者：Yu-Hao Zhai Yu-Juan Zhang Yi Peng Sheng-Mao Zhang Ping-Yu Zhang Xiao-Min Zhang 

机构地区：[1]Key Laboratory of Ministry of Education for Special Functional Materials, Henan University [2]College of Materials and Mineral Resources, Xi’an University of Architecture and Technology

出　　处：《Rare Metals》2016年第2期177-183,共7页稀有金属（英文版）

基　　金：financially supported by the Ministry of Science and Technology of China(973 Plan)(No2013CB632303);the National Natural Science Foundation of China(Nos.51001084 and 51275154)

摘　　要：nc-Ti C/a-C：H nanocomposite films were prepared by filtered cathodic arc technique. The influence of C_2H_2/Ar flow ratio on the composition, structure, and mechanical properties of films was investigated by X-ray photoelectron spectroscopy（XPS）, X-ray diffraction（XRD）, Fourier transform infrared spectroscopy（FTIR）,Raman spectroscopy, nanoindentation, and ball-on-disc tribometry. The films show a nanocomposite structure in which Ti C crystallites are embedded in the amorphous matrix of a-C：H phase. C content in films increases with the flow ratio of C_2H_2/Ar, simultaneously, the crystallite size of TiC decreases. Contrary to the nc-Ti C/a-C：H films deposited by magnetron sputtering in which the sp3 C content increases with C_2H_2 flow rate, the increase of C_2H_2 flow rate leads to the increase of sp2 C content in films deposited by filtered cathodic arc technique. The nc-Ti C/a-C：H films deposited by cathodic arc technique have a pronounced hardness maximum of 30 GPa under the C_2H_2/Ar flow ratio of 12. Tribological performance of films is controlled by the sp2 content in films. Higher sp2 content promotes the formation of graphite-like transfer layer during sliding,and results in lower wear rate and friction coefficient.nc-Ti C/a-C：H nanocomposite films were prepared by filtered cathodic arc technique. The influence of C_2H_2/Ar flow ratio on the composition, structure, and mechanical properties of films was investigated by X-ray photoelectron spectroscopy（XPS）, X-ray diffraction（XRD）, Fourier transform infrared spectroscopy（FTIR）,Raman spectroscopy, nanoindentation, and ball-on-disc tribometry. The films show a nanocomposite structure in which Ti C crystallites are embedded in the amorphous matrix of a-C：H phase. C content in films increases with the flow ratio of C_2H_2/Ar, simultaneously, the crystallite size of TiC decreases. Contrary to the nc-Ti C/a-C：H films deposited by magnetron sputtering in which the sp3 C content increases with C_2H_2 flow rate, the increase of C_2H_2 flow rate leads to the increase of sp2 C content in films deposited by filtered cathodic arc technique. The nc-Ti C/a-C：H films deposited by cathodic arc technique have a pronounced hardness maximum of 30 GPa under the C_2H_2/Ar flow ratio of 12. Tribological performance of films is controlled by the sp2 content in films. Higher sp2 content promotes the formation of graphite-like transfer layer during sliding,and results in lower wear rate and friction coefficient.

关 键 词：Nanocomposite films Tribological performance Hardness 

分 类 号：TB383.2[一般工业技术—材料科学与工程]