基于射频单电子晶体管的超灵敏电荷计的数值分析  

Numerical Analysis of an Extremely Sensitive Electrometer Based on Radio Frequency Single Electron Transistor

作　　者：苏丽娜[1,2] 李欣幸[2] 秦华[2] 顾晓峰[1] 

机构地区：[1]物联网技术应用教育部工程研究中心,江南大学电子工程系,江苏无锡214122 [2]中国科学院苏州纳米技术与纳米仿生研究所,纳米器件与应用重点实验室,江苏苏州215123

出　　处：《传感技术学报》2016年第4期484-488,共5页Chinese Journal of Sensors and Actuators

基　　金：中国科学院科研装备研制项目(YZ201152);国家自然科学基金项目(11403084);中央高校基本科研业务费专项资金项目(JUSRP51510,JUDCF12032);江苏省普通高校研究生创新计划基金项目(CXLX12_0724)

摘　　要：集成单电子晶体管SET(Single Electron Transistor)与射频共振电路的射频单电子晶体管RF SET(Radio FrequencySingle Electron Transistor)是一种高速高灵敏的电荷计。通过建立RF SET的等效电路模型,对共振电路及其与射频传输线的集成进行模拟分析,得到了SET阻抗的最佳匹配,获得了所需的谐振频率、品质因子和对SET阻抗的灵敏度。结果表明,受电荷调制的SET阻抗直接影响着共振电路的品质因子、阻抗和射频透射/反射系数。射频信号随着SET的阻抗降低而减小,峰位基本不变。在SET阻抗小于200 kΩ时,共振信号幅度随阻抗的变化率较大。透射式与反射式两种结构相比,前者共振频率及品质因子更高,后者则具有更高的灵敏度优势。By integrating a single electron transistor（SET）with a radio resonance circuit,the radio frequency singleelectron transistor（RF SET）can be used as an extremely sensitive and ultra high-speed electrometer. In this work,the equivalent circuit model of RF SET is established. The resonance circuit and the integration with the RF transmis-sion line are investigated. The optimum matching of the SET impedance,resonant frequency,quality factor and thesensitivity of the SET impedance are obtained. Results indicate that the charge-induced impedance of the SET has di-rect impacts on the quality factor,impedance and the transmission or reflection coefficient of the RF circuit. The ra-dio signal decreases with increasing impedance of the SET,while the peak position remains unchanged. The ampli-tudes of the resonance vary significantly with impedance under 200 kΩ. Comparisons indicate that the transmissionRF SET has higher resonance frequency and quality factor,while the reflection RF SET shows a higher sensitivity.

关 键 词：电荷计 射频单电子晶体管 等效电路 透射 反射 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TN302[自动化与计算机技术—控制科学与工程]