基于FBG的新型微位移测头系统的研究  

A new micro/nano displacement measurement system based on FBG sensor

作　　者：陈丽娟[1] 陈晓怀[1] 刘芳芳[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《合肥工业大学学报（自然科学版）》2016年第5期582-585,646,共5页Journal of Hefei University of Technology：Natural Science

基　　金：国家自然科学基金资助项目(51205103;51275148)

摘　　要：为了提高微位移测量系统的测量精度,文章设计了以光纤布拉格光栅(fiber Bragg grating,FBG)为传感器的触发式测头系统。该测头采用双FBG悬接式探头传感结构,实时修正温度气流振动等环境干扰的影响;球形的探针结构扩大了测量范围;同时为了降低成本和简化结构,系统采用可调谐匹配光栅法对信号进行解调。利用PI线性微动平台和Renishaw XL-80激光干涉仪做出的实验结果表明,该系统量程为30μm,最优分辨力达到10nm,非线性误差为150nm,满量程重复性小于350nm。A trigger measurement system based on the fiber Bragg grating（FBG） sensor is developed in order to improve the accuracy of the micro-displacement measurement. The suspended probe uses a doubLe-Fl3G sensing structure, which can modify the disturbances of the vibration from temperature, airflow and other envi- ronment factors in real time. The probe has a fiber fused micro-ball tip, which can expand the measurement range. Meanwhile, the matching grating filtering method is used for the signal demodulating to reduce the costs and simplify the structure of the system. The measurement system is tested with a PI nanopositioner stage and a Renishaw XL-80 laser measurement system. The experimental results show that the prototype yields a measurement resolution of 10 nm, a range of 30 peatability of less than 350 nm.

关 键 词：微位移测量 光纤布拉格光栅 双FBG传感结构 匹配光栅滤波法 

分 类 号：TH89[机械工程—仪器科学与技术]