BCB砂轮ELID磨削单晶硅工艺实验研究  

Study on ELID grinding of single crystal silicon with BCB grinding wheel

作　　者：李伟[1] 戴杰[1] 

机构地区：[1]浙江工业大学机械工程学院,浙江杭州310014

出　　处：《浙江工业大学学报》2016年第3期275-278,320,共5页Journal of Zhejiang University of Technology

基　　金：国家自然科学基金资助项目(50775207)

摘　　要：ELID磨削主要采用铸铁结合剂砂轮,但是该砂轮在使用过程中有明显的弊端,如砂轮难以制造,价格也比较高,且无法保证加工表面的清洁度.将新型环保型竹炭结合剂砂轮(BCB砂轮)与ELID磨削技术相结合,可开发一种使用简便、制作简易、并且可以达到优良的加工表面质量的新型超精密加工方法与技术.通过BCB砂轮进行单晶硅ELID磨削工艺实验,研究磨削参数对单晶硅ELID磨削表面质量,切向磨削力的影响.实验结果显示:BCB砂轮进行单晶硅ELID磨削加工过程中磨削性能良好,可获得高效率、高质量表面加工效果.Electrolysis In-process Dressing（ELID）grinding mainly uses the cast iron bonded grinding wheel,however it is expensive for manufacturing,and the making process is complex and difficult.During the grinding process of silicon,sapphire and other functional materials,it is easy to cause pollution to the ground surface of these materials.This paper proposed a new kind of grinding wheel,which uses the bamboo charcoal bonded（BCB）grinding wheel,and applied to ELID grinding for single crystal silicon.Based on the ELID grinding experiments,the grinding parameters（electrolytic voltage,duty ratio and vertical feed,and grinding wheel rotation speed etc.）influence of the tangential grinding force,and ground surface roughness have been studied,the experimental results showed that,the ELID grinding process has the excellent grinding performance,aprecision and efficient grinding process for silicon has been gained by the ELID grinding with BCB grinding wheel.

关 键 词：ELID磨削 BCB砂轮 表面质量 切向磨削力 

分 类 号：TH161.1[机械工程—机械制造及自动化]