双质量硅微机械陀螺仪带宽拓展系统设计  

Bandwidth expanding system design of dual-mass silicon MEMS gyroscope

作　　者：曹慧亮[1,2] 李宏生[3] 申冲[1,2] 石云波[1,2] 刘俊[1,2] 王华[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术国防科技重点实验室,太原030051 [3]东南大学仪器科学与工程学院,南京210096

出　　处：《中国惯性技术学报》2016年第2期218-223,共6页Journal of Chinese Inertial Technology

基　　金：国家杰出青年科学基金(51225504);973(2012CB723404);总装预研基金项目(9140A09011313JW06119);江苏省科技攻关项目(BE2014003-3);中北大学校基金

摘　　要：检测开环状态下,微机械陀螺的实际工作带宽约为驱动和检测模态固有频率差值(?f)的一半,而陀螺结构的机械灵敏度与Δf成反比,较高的机械灵敏度有助于优化陀螺的噪声特性。本文提出了一种较为通用的陀螺带宽拓展方法,在使陀螺拥有较好的机械灵敏度基础上有效提高陀螺带宽以增强其动态环境适应性。首先,建立了陀螺检测系统的模型,并进一步得到了陀螺结构的传递函数和机械带宽。其次,分析了带宽拓展控制器的系统特性,设计了基于比例-积分串联相位超前控制方法的带宽拓展控制器,并对其进行了系统级和电路级仿真,验证了设计参数。最后进行了测试,结果表明采用本文所述方法可将陀螺带宽从原有的13 Hz拓展到了104 Hz,且具有较好的带内平整度,验证了设计方案。In open-loop sense mode, the working bandwidth of MEMS gyroscope is about half of Δf（the frequency gap between drive and sense modes）, and the mechanical sensitivity of gyro structure is inversely proportional to Δf, and higher mechanical sensitivity contributes to optimizing the gyro＇s noise characteristics. This paper proposes a method for gyro bandwidth extension, which breaks the conflict between mechanical sensitivity and bandwidth. The sense loop system model is established, and the transform function and the mechanical bandwidth are analyzed. The bandwidth expanding controller is investigated, which employs the proportional integral phase lead technology. The controller is simulated in both system and circuit levels, and the design parameters are proved. Test results show that the bandwidth is expanded from 13 Hz to 104 Hz by the controller, and the flatness in bandwidth is better, which prove the effectiveness of the proposed method.

关 键 词：双质量硅微机械陀螺仪 带宽拓展 比例-积分串联相位超前 模型仿真 

分 类 号：U666.1[交通运输工程—船舶及航道工程]