扫描探针显微镜用碳纤维探针的电化学腐蚀制备方法  

Preparation of carbon fiber tips for scanning probe microscope by electrochemical etching

作　　者：彭平[1] 郝立峰[1] 王琦[1] 张健[1] 陆小龙[1] 刘文博[2] 矫维成[1] 杨帆[1] 王荣国[1] 

机构地区：[1]哈尔滨工业大学复合材料与结构研究所,哈尔滨150080 [2]哈尔滨工业大学材料学院,哈尔滨150001

出　　处：《中国科技论文》2016年第4期418-420,437,共4页China Sciencepaper

基　　金：高等学校博士学科点专项科研基金资助项目(20122302120034)

摘　　要：为了克服传统SPM金属探针的易变形、易磨损、使用寿命短等缺点,利用自主开发的电化学腐蚀控制电路,采用电化学腐蚀法制备了碳纤维探针,并研究了制备工艺条件对碳纤维探针形貌的影响。实验结果表明最佳制备工艺条件为:采用高模量的M55J碳纤维,腐蚀起始电压为4V,参考电压为1V,电解液为4mol/L的NaOH溶液。在此工艺条件下制得了尖端曲率半径约为30nm的碳纤维探针,制备的成功率在50%以上。在室温、大气环境条件下,用上述碳纤维探针对高定向裂解石墨表面进行STM扫图,图像呈现清晰的石墨台阶,说明采用电化学腐蚀法制备的碳纤维探针性能稳定,满足SPM使用的要求。To overcome the disadvantages of traditional metal tips for SPM,such as easy deformation,abrasion,short lifespan and so on,carbon fiber tip was prepared by electrochemical etching using self-developed tip etching control circuit.The influences of the preparation conditions on the carbon fiber tip were investigated.The results show that the high modulus carbon fiber M55 J is suited to prepare carbon fiber tip.And the corresponding optimal processing parameters are：onset etching voltage,4V;reference voltage,1V;concentration of NaOH electrolyte solution,4mol/L.The curvature radius of the carbon fiber tip is about 30 nm with the success rate of preparation even being over 50%.The carbon fiber tip was utilized to probe a freshly cleaved surface of highly oriented pyrolytic graphite in STM at room temperature and atmospheric conditions.The image shows clear graphite steps,which means that the carbon fiber tip prepared by electrochemical etching has stable performance and can meet the requirement of SPM.

关 键 词：材料学 碳纤维探针 电化学腐蚀 扫描探针显微镜 

分 类 号：TH742[机械工程—光学工程]