蒙特卡罗方法在亚微米尺度金镀层厚度分析中的应用  

The application of Monte Carlo method in determination of sub-micron scale gold coating thickness

作　　者：周莹[1] 杨静[1] 张丽琪 厉艳君[1] 郝萍[1] 

机构地区：[1]上海市计量测试技术研究院

出　　处：《上海计量测试》2016年第3期14-17,共4页Shanghai Measurement and Testing

基　　金：上海市质量技术监督局科技计划项目(2014-02)

摘　　要：利用能谱仪(energy dispersive spectrometer,EDS)及蒙特卡罗方法(Monte Carlo method)确定金(Au)镀层厚度。使用不同加速电压对试样表面进行EDS成分分析,选取镀层元素含量在80%～99%的加速电压进行蒙特卡罗模拟计算,可以快速获得镀膜厚度。同时,为了验证蒙特卡罗方法的可靠性,对样品进行FIB制样和SEM厚度测试。两者结果基本一致。该方法适用于20～1000 nm金(Au)镀层厚度的测量。The thickness of gold (Au) coating is determined by the energy dispersive spectrometer (EDS) and Monte Carlo method. The composition analysis of the specimen surface is carried out by EDS with different accelerated voltages, and the accelerated voltage is selected which corresponds to the coating element content within 80%-99% for Monte Carlo simulation and calculation. As a result, the coating thickness can be quickly obtained. Meanwhile, in order to verify the reliability of the Monte Carlo method, the specimen is prepared by FIB and the gold (Au) coating thickness is measured by SEM. The results of two methods are consistent. The Monte Carlo method is suitable for determining the gold (Au) coating thickness of 20-1 000 nm.

关 键 词：蒙特卡罗方法 能谱仪 镀层厚度 特征X射线 

分 类 号：TG115[金属学及工艺—物理冶金]