基于干涉条纹相关性测量PZT相移特性的方法  

The Measurement Method of PZT Phase Shift Characteristic Based on Interference Fringe Correlation Coefficient

作　　者：赵英明[1] 杨若夫[1] 杨春平[1] 马小莉[1] 程马兵 

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《压电与声光》2016年第3期501-503,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61308062)

摘　　要：闭环压电陶瓷(PZT)具有良好的线性特征,能实现纳米级分辨率,在微位移过程中响应快,精度高,广泛用于光学测量领域。在干涉测量中,利用PZT控制反射镜的移动,引入可控相移,需要知道PZT的电压相移特性。提出了基于干涉条纹图样的相关性测量PZT电压相移特性的方法,利用CMOS数字摄像机采集干涉条纹图样,以零电压对应的图样为基准图,做归一化相关系数运算,最后得到PZT电压相移特性曲线,满足了干涉测量相移可控的要求。PZT is widely used in the field of optical measurement for better linear characteristic,nano-scale resolution,quickly responding and precision in the process of micro-displacement.For the interfere measurements,PZT is applied to control the movement of mirror and introduce the controllable phase shift,thus it is required to know the characteristic of PZT between voltage and phase.A measurement method of PZT phase shift characteristic based on interference fringe correlation coefficient was presented in this paper.The interference fringe pattern was captured by CMOS digital cameras capture.The normalized correlation coefficient was calculated by 0voltage corresponding pattern as a benchmark figure,and the PZT voltage phase shift characteristic curve was drawn to realize the phase control in interfere measurement.

关 键 词：PZT压电陶瓷 干涉测量 归一化相关系数 相移 光电检测 

分 类 号：TN911[电子电信—通信与信息系统] TM930[电子电信—信息与通信工程]