液相沉积法制备(004)取向的TiO_2薄膜  

Preparation of TiO_2Thin Film with(004) Orientation via Liquid Phase Deposition

作　　者：张欣[1] 徐海燕[1] 陈博[1] 

机构地区：[1]安徽建筑大学安徽省先进建筑材料重点实验室,合肥230061

出　　处：《人工晶体学报》2016年第5期1416-1420,共5页Journal of Synthetic Crystals

基　　金：高校优秀青年人才支持计划重点项目(gxyq ZD2016150);安徽省教育厅自然科学研究项目(KJ2016A819)

摘　　要：采用液相沉积法(LPD)制备二氧化钛薄膜,探索p H值对二氧化钛薄膜样品成份、结构和性能的影响,利用XRD、FESEM、UV等方法对薄膜的结构、形貌以及光学特性进行表征。结果表明LPD制备的二氧化钛薄膜为锐钛矿相,可见光透过率高达80%,具有明显的(004)取向;薄膜的结构和光学特性依赖沉积液p H值,p H=2.03时所制备的薄膜取向性最佳,柱状晶粒排列整齐。The TiO_2 films were fabricated by the liquid phase deposition（LPD） method at different p H values.The effect of p H value on the titanium dioxide film sample composition,structure and properties was explored.T he compositional,structural studies and optical properties of TiO_2 thin film were performed by X-ray diffraction（XRD）,field emission scanning electron microscopy（FESEM） and ultraviolet-visible spectroscopy（UV）,respectively.The results indicate that the prepared anatase TiO_2 films obviously orient in（004） direction and the thin films show high transmittance of about 80% in visible range.The TiO_2 film of structure and optical properties strongly depend on the p H value were confirmed.The as-prepared TiO_2 films are consisted of the aligned columnar crystallites and shows good orientation in c-axis when the p H value is 2.03.

关 键 词：液相沉积 PH值 (004)取向 TIO_2薄膜 

分 类 号：O484[理学—固体物理]