激光大尺度3维动态聚焦扫描加工系统研究  

Study on large scale 3-D laser dynamic scanning manufacturing systems

作　　者：李东华[1] 邓磊敏[1] 段军[1] 曾晓雁[1] 游欣易 

机构地区：[1]华中科技大学武汉光电国家实验室,武汉430074

出　　处：《激光技术》2016年第4期466-471,共6页Laser Technology

基　　金：国家自然科学基金资助项目(51175205;51475182)

摘　　要：为了满足激光3维微加工不断提高的精度要求、不断增大的加工尺寸范围,以及加工效率的上升需求,采用理论分析和计算结合的方法,研制出由动态聚焦镜和2维扫描振镜组合的动态聚焦系统,与高精度X-Y-Z 3维高精度工作台集成为一台激光大尺度3维动态聚焦扫描加工设备。设计了焦距为100mm、视场角±15°、光阑口径7mm、后工作距137mm、相对畸变小于0.5%的远心f-θ镜和入光口径8mm、光学杠杆比1∶8、后工作距800mm±40mm的动态聚焦镜系统,并使用ZEMAX软件对系统关键光学部件动态聚焦镜和远心f-θ镜进行光学设计及系统性能评价。结果表明,通过工艺控制软件分层拼接,实现了460mm×310mm×50mm大尺度3维动态聚焦的高精度紫外激光微加工功能,在该3维扫描范围内,激光聚焦光斑直径始终保持小于10μm,从而满足大尺度激光3维精密微加工需求。In order to meet the requirements of increasing precision, processing size and processing efficiency of 3-D laser micromachining, after theoretical analysis and calculation, a dynamic focusing system was designed combining the dynamic focusing lens with the 2-D galvanometer scanning system. A large scale 3-D laser dynamic focusing scanning processing system was proposed with the combination of the dynamic focusing system and a high precision X-Y-Z 3-D working stage. Telecentric f-θ lens was designed with focal length of 100mm, field angle of ± 15°, aperture size of 7mm, back focal length of 137mm and relative distortion of less than 0. 5%. And a dynamic focusing system was designed with aperture size of 8mm, optical leverage ratio of 1:8 and back focal length of 800mm ± 40mm. ZEMAX was used to analyze and evaluate the optical design and system performance of the dynamic focusing lens and telecentric f-θ lens. The results show that, after layer stitching with the process control software, large-scale (460mm × 310mm × 50mm) 3-D dynamic focusing precision UV laser micromachining system is achieved. In 3-D scanning range, laser beam spot diameter remains always less than 10μm and meets the needs of large-scale 3-D precision laser micromachining.

关 键 词：激光技术 3维动态聚焦 光学设计 3维微加工 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TN229[电子电信—物理电子学]