梳齿式静电微驱动器稳定性分析与结构优化  

Stability Analysis and Structure Optimization of the Electrostatic Comb-Finger Micro-Actuator

作　　者：单体强[1] 齐杏林[1] 周晓东[1] 范志锋[1] 

机构地区：[1]军械工程学院弹药工程系,石家庄050003

出　　处：《微纳电子技术》2016年第7期449-455,472,共8页Micronanoelectronic Technology

基　　金：装备预研基金项目(9140A05050115JB34065)

摘　　要：针对典型梳齿式静电微驱动器驱动稳定性差的问题,建立微驱动器驱动稳定性分析模型,系统分析微驱动器驱动稳定性随其各结构参数的变化关系,提出基于稳定性因子的微驱动器驱动稳定性评估方法。提出弹性支撑机构外置方案,建立弹性梁非线性特征模型,基于模型分析结果设计预弯弹性梁结构,建立基于梳齿结构参数的静电力模型,研究不同梳齿结构对驱动器驱动稳定性的影响。研究结果表明,弹性支撑机构外置、预弯弹性梁结构以及线性交叠梳齿结构能够有效提高梳齿微驱动器大位移输出的驱动稳定性。The driving stability of the typical electrostatic comb-finger micro-actuator is poor.To solve this problem,the driving stability analysis model of the micro-actuator was set up.The change relationships between the driving stability and structure parameters of the micro-actuator were analyzed systematically.The valuation method of the driving stability of the micro-actuator based on the stability factor was proposed.The plan of the external elastic support mechanism was proposed.The nonlinear characteristic model of the elastic beam was set up.The pre-bending elastic beam was designed based on the model analysis results.The electrostatic force model based on the parameters of the comb-finger structure was set up.The effects of the different comb-finger structures on the driving stability of the micro-actuator were investigated.The study results show that the external elastic support mechanism,pre-bending elastic beam and linear overlap comb-finger can effectively improve the driving stability of the large displacement output for the comb-finger micro-actuator.

关 键 词：静电微驱动器 稳定性 弹性支撑机构 梳齿结构 静电力模型 

分 类 号：TH703[机械工程—仪器科学与技术]