集成阵列叉指电极介电泳芯片粒子分离  

Particles Separation of the Dielectrophoretic Chip with Integrated Interdigitated Array Electrodes

作　　者：方明[1,2] 樊磊[1,2] 曾一笑 谭秋林[1,2] 孙东[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2016年第7期461-466,共6页Micronanoelectronic Technology

基　　金：山西省基础研究项目(2014011021-3)

摘　　要：制备了用于粒子分离的集成阵列叉指电极介电泳微流控芯片,该芯片由以玻璃为基底的氧化铟锡(ITO)电极以及聚二甲基硅氧烷(PDMS)微流通道构成。采用该芯片测定了聚苯乙烯微球在电导率为1μS/cm的悬浮溶液中在不同频率下的介电泳响应。聚苯乙烯微球产生正负介电泳响应的临界频率为20 kHz。当交流电压和频率分别为8Vp-p(峰峰值)和2 MHz时获得最优的粒子分离条件,在此条件下对聚苯乙烯微球和酵母菌细胞进行分离实验。实验结果表明,酵母菌细胞受到正介电泳力的作用,被富集到电极的边缘,而聚苯乙烯微球受到负介电泳力的作用被排斥而远离电极,其分离效率能够达到90%。A dielectrophoresis（DEP）microfluidic chip with integrated interdigitated array electrodes was fabricated to separate particles.The chip consists of the indium tin oxid（ITO）electrodes based on a glass substrate and polydimethylsiloxane（PDMS）microchannel.The dielectrophoresis responses of the polystyrene microspheres in the suspension solution with a conductivity of 1μS/cm at different frequencies were measured by the chip.The crossover frequency of positive and negative dielectrophoresis responses generated by the polystyrene microspheres is20 kHz.The optimized particles separation condition was obtained under the AC voltage of 8Vp-p（peak-to-peak value）and the frequency of 2 MHz.The separation experiments of polystyrene microspheres and yeast cells were carried out.The experiment results show that the yeast cells suffer the positive DEP force and are enriched on the edge of electrodes,and the polystyrene microspheres suffer the negative DEP force and are rejected to move away from the electrodes.The separation efficiency can reach 90%.

关 键 词：阵列叉指电极 介电泳(DEP) 微流控芯片 粒子分离 临界频率 

分 类 号：O35[理学—流体力学]