直流辉光等离子体的边缘效应  

Edge effect of DC glow discharge plasma

作　　者：冯军[1,2] 陈美艳[1] 金凡亚[1] 但敏[1] 聂军伟 沈丽如[1] 童洪辉[1] 赖新春[3] 

机构地区：[1]核工业西南物理研究院,四川成都610041 [2]南华大学电气工程学院,湖南衡阳421001 [3]四川材料与工艺研究所,四川江油621700

出　　处：《金属热处理》2016年第6期89-93,共5页Heat Treatment of Metals

基　　金：ITER计划国内配套专项课题(2013GB110006);国家自然科学基金(11305054;11305055)

摘　　要：结合辉光渗氮试验结果,对直流辉光等离子体材料处理中的边缘效应进行了研究,根据相关鞘层理论,对工件边角处及其附近的鞘层厚度S、电场强度E及离子密度n进行了定性分析。结果表明:在边缘效应范围d内,当远离边角时,S将变大、E及n变小。主等离子体密度n0的减少将使边缘效应的影响范围d变大,因此降低工作气压p及电流I可减弱边缘效应。采用改进措施渗氮后,工件边缘效应得到抑制,且渗氮效果较好。Combined with the test results of glow discharge nitriding, edge effect of metals during DC glow discharge plasma treatment was investigated. According to the related theory of sheath, the sheath thickness S, electric field intensity E and ion density n in the corner of the work piece and its vicinity were analyzed qualitatively. The results show that the S increases, E and n decrease when far from the work piece edge in the edge effect range d. The decrease of the main plasma density no make the influence range d of the edge effect larger, thus lowering the working pressure p and the current I can weaken the edge effect. After nitriding by improved measures, the edge effect of the workpiece is suppressed, and the effect of nitriding is better.

关 键 词：边缘效应 直流辉光 鞘层理论 辉光渗氮 

分 类 号：TG156.8[金属学及工艺—热处理]