光程可调吸收气室气体传感器研究  

Study of absorption cell gas sensor with adjustable optical path

作　　者：程跃[1] 罗晓乐 刘磊[1] 张鹏[1] 吴礼章[1] 叶杨高[1] 

机构地区：[1]中国电子科技集团公司第八研究所,安徽合肥230051 [2]中国科学院安徽光学精密机械研究所光学工程中心,安徽合肥230000

出　　处：《传感器与微系统》2016年第6期56-58,65,共4页Transducer and Microsystem Technologies

摘　　要：光程可调吸收气室可满足光纤气体传感器不同探测灵敏度和量程的需求。介绍了吸收气室的基本结构,并利用Trace Pro软件对气室进行了光学仿真设计和分析,确定了多次反射池的光学参数。对气室的结构、防腐工艺、密封工艺及光程可调节进行了研究。通过调试和实验测量,结果表明：气室光程可在0.8~30 m范围调节,完全可应用于低浓度气体（对应长光程气室）和高浓度气体（对应短光程气室）的检测。A gas absorption cell with an adjustable optical path can meet the requirements of an optical fiber gas sensor with the different detection sensitivity and range. Basic structure of the gas absorption cell is introduced. Optical parameters of the gas absorption cell are identified through the optical simulation and analysis of the gas absorption cell using TracePro. Structure, anticorrosion process, sealing process and adjustable optical path of the gas absorption cell are studied. Experimental results demonstrate that light range of cell optical path can be modulated at 0.8 -30 in and the cell can be fully applied in detection of the low concentration gas and high concentration gas.

关 键 词：光纤气体传感器 吸收气室 可调光程 气室光学仿真 TRACEPRO 

分 类 号：TN253[电子电信—物理电子学]