光学玻璃磁性复合流体抛光液研究  

Research for Magnetic Compound Fluid Slurry of Optical Glass

作　　者：李文妹[1] 姜晨[1] 许继鹏 王春华[1] 

机构地区：[1]上海理工大学机械工程学院,上海200093

出　　处：《激光与光电子学进展》2016年第6期266-273,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51475310);高等学校博士学科点专项科研基金(20133120120005);上海市科学技术委员会资助项目(13ZR1428000)

摘　　要：根据光学玻璃元件超精密抛光加工技术的需求,研究了磁性复合流体(MCF)抛光液成分配比及制备,并在此基础上结合不同抛光工艺参数实验分析BK7光学玻璃的抛光质量。研究不同成分配比下的磁性复合抛光头的物理表现,在MCF各成分质量分数为铁粉55%、水30%、氧化铈12%以及α-纤维素3%时,获得形状及稳定性最佳的MCF抛光头;采用该比例配制的MCF在自行研制的MCF抛光设备上对BK7玻璃进行定点抛光,对MCF抛光头正压力及BK7玻璃抛光后的表面粗糙度进行研究。通过实验数据分析发现抛光正压力随主轴转速的增大而增大,随磁铁偏心距的增大而减小,经过50min定点抛光,表面粗糙度从10.2nm降低到6.7nm。上述结果表明所制备MCF满足光学玻璃超精密抛光加工的需求。According to the requirement of ultra-fine finishing of optical glass, composition and preparation of magnetic compound fluid （MCF） slurry are analyzed, and the polishing quality of BK7 optical glass is investigated with the different polishing parameters based on the prepared MCF slurry. Firstly, the physical performances of MCF polishing head in different mass fractions are investigated. A good shaped and stable MCF polishing head composed by iron powder 55% （ mass fraction）, H2O 30%, cerium oxide 12% and a-cellulose 3% is obtained. Then, the prepared MCF slurry has been used to spot polish experiment on BK7 optical glass by using a self- designed MCF polishing machine. The normal pressures of MCF polishing head and polished surface roughness have been experimentally investigated. The experimental results show that normal pressure of MCF polishing increases with the increase of spindle speed, and decreases with the increase of magnet eccentricity. And the surface roughness of workpiece has been improved from 10.2 nm to 6.7 nm after 50 min spot-polishing. It indicates that the MCF slurry meets the demand of ultra-fine finishing of optical glass.

关 键 词：光学制造 磁性复合流体 抛光 正压力 表面粗糙度 

分 类 号：TQ171.68[化学工程—玻璃工业]