(111)SrTiO_3衬底处理调制ZnO薄膜的面内外延关系研究  

Tailoring the in-plane epitaxial relationship of ZnO film on (111) SrTiO_3 substrate by substrate pretreatment

作　　者：张国玺 贾彩虹[2] 

机构地区：[1]郑州幼儿师范高等专科学校,郑州450099 [2]河南大学物理与电子学院和光伏材料省重点实验室,开封475004

出　　处：《化工新型材料》2016年第6期158-160,共3页New Chemical Materials

基　　金：国家自然科学基金青年项目(51202057);河南省教育厅项目(12A480001)

摘　　要：采用脉冲激光法在未处理和水浸泡的(111)SrTiO_3(STO)衬底上都生长得到了c轴取向的纤锌矿结构ZnO薄膜。ZnO薄膜与STO衬底之间的外延关系使用X射线进行研究。发现在未处理和水浸泡的(111)SrTiO_3衬底的面内排列分别是[1120]_(ZnO)//[110]_(STO)和[1100]_(ZnO)//[110]_(STO),它们之间相互旋转30o。ZnO薄膜相对于STO衬底的面内取向强烈依赖于衬底处理。可能是未处理和水浸泡STO衬底终止面的差别导致了外延关系的改变。相比来说,[1100]_(ZnO)//[110]_(STO)比[1120]_(ZnO)//[110]_(STO)能量更低,这是由于SrO_3比Ti终止STO衬底具有更高的成键密度和较低的界面能。Wurtzite ZnO films of c-axis orientation were grown on as-received and water-immersed（111）SrTiO3（STO）substrates by pulsed laser deposition.The epitaxial relationships between ZnO films and STO substrates were investigated by X-ray diffraction.Two kinds of in-plane alignment of[1120]ZnO//[110]STOand [1100]ZnO//[110]STO with a 30°rotation relative to each other were realized on as-received and water-immersed（111）STO substrates,respectively.The inplane orientation of ZnO relative to STO was strongly dependent on substrate pretreatment.The difference in terminated surfaces of as-received and water-immersed STO substrates were postulated to be responsible for the change in epitaxial relationships.Compared with each other,the in-plane epitaxial relationships of[1100]ZnO//[110]STOand[1120]ZnO//[110]STO were respectively energetically preferred due to a higher bonded density and thus a lower interface energy on SrO3-and Titerminated STO substrates.

关 键 词：面内取向 氧化锌 钛酸锶 脉冲激光沉积 

分 类 号：TQ132.41[化学工程—无机化工] TB383.2[一般工业技术—材料科学与工程]