干式涡旋真空泵的动平衡工艺与振动品质研究  

Dynamic Balance and Vibration Suppression of Dry Scroll Vacuum Pump

作　　者：丛培田[1] 曹松松[1] 张振厚[2] 王光玉[2] 刘在行[2] 

机构地区：[1]沈阳理工大学机械工程学院,沈阳110159 [2]中国科学院沈阳科学仪器股份有限公司,沈阳110159

出　　处：《真空科学与技术学报》2016年第6期613-617,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家重大科学仪器设备开发专项(2013YQ240421)

摘　　要：针对干式涡旋真空泵的振动平衡问题,对其工作原理、机械动力学模型、渐开线型线的理论偏心等方面进行了分析。提出相应动平衡设计方法并对核心部件进行三维建模:其中包括动涡旋盘的质心调整,扇叶上下两个扇区厚度差异设计。通过Fluent对涡旋盘进行空气动力学的仿真,设计专用夹具及配重块并进行实验验证,以确定整套的平衡工艺方法。研究结果表明:整机动平衡精度可达0.2 g以下,振动数值由10降到1 mm/s左右,平均用时15 min,减振效果显著,生产效率得到极大提高。The vibration balanceandvibrationsuppression of dry scroll vacuum pump was empirically approxima- ted ,mathematically modeled, theoretically analyzed in aerodynamics, numerically simulated in finite element method with software FLUENT, and experimentally investigated. The design modification included the barycentre adjustment of the orbiting scroll and the replacement of a uniform cooling fan plate with the plate consisting of a thick upper-sector and a thin lower-sector. The vibration balance of the scroll vacuum pump,with the newly-designed orbiting scroll and cooling fan plates,was experimentally evaluated and numerically simulated with the assistance of a dedicated fixture and an optimized clamp weight. The results show that the newly-modified design significantly damps the vibration of the dry scroll vacuum pump. To be specific, the dynamic balance precisionwas found to be better than 0. 2 g, accompa- nied by the vibration suppression from 10 mm/s to about 1 rnm/s roughly in an average time of 15 min.

关 键 词：干式涡旋真空泵 配重块 振动 动平衡 

分 类 号：TH36[机械工程—机械制造及自动化]