基于多孔硅微腔微阵列的制备及检测  

Fabrication and Detection Based on Porous Silicon Microcavity Microarray

作　　者：陈位荣 贾振红[2] 吕小毅[2] 李鹏[1] 

机构地区：[1]新疆大学物理科学与技术学院,新疆乌鲁木齐830046 [2]新疆大学信息科学与工程学院,新疆乌鲁木齐830046

出　　处：《新疆大学学报（自然科学版）》2016年第3期313-316,共4页Journal of Xinjiang University(Natural Science Edition)

基　　金：国家自然科学基金(61265009;11264038);新疆科技厅项目(201412112)

摘　　要：我们结合光刻和电化学腐蚀方法,成功在单晶硅衬底上制备出一个8×8的一维多孔硅光子晶体微腔的微阵列器件,微阵列的每个阵列单元直径300μm,间距200μm.研究了这种微阵列在633nm激光入射情况下的光学特性.利用我们制备的多孔硅光子晶体微腔的微阵列器件,借助数字图像测量方法,可实现快速的检测.本文的研究结果可应用于生物传感器阵列的检测.By combining photolithography with the electrochemical anodization method, A 8×8 square matrix of Porous Silicon one dimensional photonic crystals, each one of 300μm diameter and spaced by200μm, the microarray device of porous silicon photonic crystal was fabricated on the crystalline silicon substrate.The optical properties of the microarray were analyzed at 633 nm was also studied.The change of the reflectivity of the array element is analyzed observed through digital imaging.Using the Porous Silicon Microcavity Microarraydevice, we can realize the rapid detection by using the digital image measurement method. The results of this study can be applied to the study of biosensor arrays.

关 键 词：多孔硅 微腔 微阵列 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置] O433.4[自动化与计算机技术—控制科学与工程]