模拟浮法玻璃在线CVD制备SnO_2∶Sb薄膜及其性能研究  

Synthesis and Properties Research of SnO_2∶Sb Thin Films by Simulating Float Glass On-line CVD Process

作　　者：崔永红 张振华 赵会峰 陈峰[3] 刘晓娟 姜宏[1,2,3] 

机构地区：[1]海南中航特玻材料有限公司特种玻璃国家重点实验室,澄迈571924 [2]海南中航特玻科技有限公司,澄迈571924 [3]海南大学海南省特种玻璃重点实验室,海口570228

出　　处：《硅酸盐通报》2016年第6期1856-1860,共5页Bulletin of the Chinese Ceramic Society

基　　金：国家支撑项目(2013BAJ15B04);海南省重大科技项目(ZDZX2013002)

摘　　要：利用模拟在线CVD镀膜的实验设备,通过改变原料参数而在玻璃表面制备了ATO系列薄膜样品,并通过紫外-可见-近红外分光光度计、XRD、SEM及方块电阻计等测试手段研究参数变化对膜层结构与性能的影响。结果表明:不同工艺参数下,所制备的薄膜均为四方相金红石型结构;当Sb掺杂量为3wt%,Sn/H2O摩尔比为2∶1时,制备出的薄膜样品性能表现为:可见光透过率为79.25%;方块电阻为20Ω·□-1;遮蔽系数为0.66,其在保证良好采光的同时具备一定遮阳及低辐射性能,可满足市场需求。Antimony-doped tin oxide film samples were deposited on glass substrates using the equipment of simulating on-line CVD coating process by changing the parameter of precusors.The influences on the structure and properties of the films by different parameters were measured by UV-visible-near-infrared spectrophotometer,XRD,SEM,and sheet resistance meter.The results show that all the as-prepared films had tetragonal cassiterite structure.When the content of antimony dopant was 3wt% and the molar ratio of Sn/H_2O was 2 ∶ 1,the performances which the as-prepared films exhibited were that the visible light transmittance could reach to 79.25%,the sheet resistance was 20 Ω · □-1and the shading coefficient was 0.66,which can achieve the goal of solar-control and low emissivity under the condition of ensuring good lighting.Therefore,it can meet the demand of market.

关 键 词：模拟在线CVD镀膜 锑掺杂 遮阳 低辐射 

分 类 号：TB43[一般工业技术] TB34