NI视觉软件的光学元件厚度测量装置  

The Experimental Device for Measuring the Thickness of the Optical Elements Based on NI Vision Software

作　　者：周冀馨[1] 

机构地区：[1]天津电子信息职业技术学院电子技术系,天津300350

出　　处：《实验室研究与探索》2016年第6期131-134,142,共5页Research and Exploration In Laboratory

摘　　要：介绍一种基于NI视觉软件的光学元件厚度测量装置。首先介绍光学元件厚度测量的基本原理-迈克尔逊等倾干涉;然后搭建光路,利用CCD进行干涉图像采集,传输到计算机中,利用NI视觉软件对图像进行处理,得出光学元件厚度;最后对测量误差产生的原因和消除途径进行了分析。该装置经过详实周密的数据处理,提高了测量精度和分辨力。This paper describes an apparatus for measuring the thickness of the optical element based on NI vision software. Firstly, we introduce the basic principle of optical element thickness measurement-equal inclination of Michelson interference. Then we set up the optical path,the interference image is captured by the CCD. We transfer interference image from CCD to the computer. And we use NI visual software to obtain the thickness of the optical element by processing image. Finally,we analyze the causes of measurement error and the ways of removing the errors.The apparatus improves the measurement accuracy and resolution by the detailed and careful image processing.

关 键 词：迈克尔逊干涉仪 等倾干涉 厚度测量 NI视觉软件 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]