聚焦离子束致形变微纳加工研究进展  

Focused-ion-beam stress introducing technology for micro/nano-fabrications

作　　者：毛逸飞 吴文刚[1] 徐军[2] 

机构地区：[1]北京大学微米/纳米加工技术国家重点实验室,北京100871 [2]北京大学电子显微镜实验室,北京100871

出　　处：《电子显微学报》2016年第4期369-378,共10页Journal of Chinese Electron Microscopy Society

基　　金：国家级先进制造预研项目;国家自然科学基金资助项目(No.50775001);国家"863计划"专题课题(No.2009 AA01Z228)

摘　　要：聚焦离子束技术(focused ion beam,FIB)由于其高精度刻蚀、定点加工、实时成像等优势,常用于精密加工、TEM制样等领域。其工作机理通常为:刻蚀、淀积与成像。而基于FIB新的加工手段正在被探索和研究,其中就包括两种聚焦离子束致形变技术,分别为聚焦离子束应力引入致形变技术(FIB-stress induced deformation,FIBSID)和聚焦离子束物质再分布致形变技术(FIB-material-redistribution induced deformation,FIB-MRD)。前者通过控制FIB辐照时离子注入与溅射之间的竞争关系实现悬臂梁的多角度弯曲,后者利用粒子与物质作用时的瑞利不稳定性构建纳米结构,在一定意义上扩充了聚焦离子束的应用范围。运用上述方法可以加工三维微纳螺旋,悬浮光滑纳米弦以及大规模阵列化纳米网孔等多样化微/纳功能构件,在微流控系统,太赫兹通信,光学天线等领域具有很强的应用前景。Focused ion beam （ FIB） technology is often applied in the fields of ultra-fine fabrication and TEM sample-preparation, because of its advantages of ultra-fine etching, pointing process and real-time imaging. The fundamental methods include three aspects：etching, deposition and imaging. Here two novel fabrication methods based on FIB are presented, which are called FIB stress introduced deformation （ FIB-SID） and FIB material redistribution induced deformation （ FIB-MRD） . FIB-SID can precisely control the bending of structures by adjusting the relationship between ion implantation and sputtering during FIB scanning, and FIB-MRD will help build nano-structures utilizing Rayleigh instability during the interaction between ions and the target. By these methods, three dimensional micro/nano-helices, suspended and smooth ultra-thin nanowires as well as large scale nanopore arrays will be produced, which will have great potential in the fields such as micro-fluidic systems, Terahertz communication systems and optical antennas and so on.

关 键 词：聚焦离子束应力引入致形变 聚焦离子束物质再分布致形变 微/纳功能结构加工 

分 类 号：TH16[机械工程—机械制造及自动化]