A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication  

作　　者：Zhen Zhang Peng Wang Peng Yan YingChun Guan 

机构地区：[1]State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering,Tsinghua University [2]Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University [3]State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University [4]Key Laboratory of High-efficiency and Clean Mechanical Manufacture, Ministry of Education, School of Mechanical Engineering,Shandong University [5]School of Automation Science and Electrical Engineering, Beihang University [6]School of Mechanical Engineering and Automation, Beihang University

出　　处：《Science China(Physics,Mechanics & Astronomy)》2016年第8期50-55,共6页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry(Grant No.20121028120);the National Natural Science Foundation of China(Grant No.61327003);the Open Foundation of the State Key Laboratory of Fluid Power andMechatronic Systems(Grant No.GZKF-201413);the Fundamental Research Funds of Shandong University(Grant No.2015JC034);the National Key Basic Research Program of China(Grant No.2015CB059900);Beijing Natural Science Foundation(Grant No.3162019);the Fundamental Research Funds of Beihang University(Grant No.74003401)

摘　　要：A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in: a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm(RMS) error of tracking a circular trajectory.A nanopositioning system of both millimetric stroke and nanometric tracking accuracy is a key component for nanofabrication in many applications. In this paper, a novel bi-axial beam-flexure nano servo stage is proposed to support a direct writing system for femtosecond laser nanofabrication. The important features of the stage lie in： a mirror symmetric instead of rotational symmetric configuration is adopted to restrict cross axis coupling, and a novel Z-shaped guidance module is proposed to achieve relative large linear stiffness range, in addition a redundant constraints module is introduced to increase off-axis stiffness of the stage. Mechanical analysis and system identification are provided, with which a feedback control algorithm demonstrates the tracking capability for laser fabrication purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the millimetric operating workspace and 77.8 nm（RMS） error of tracking a circular trajectory.

关 键 词：laser nanofabrication direct writing servo and control system 

分 类 号：TB383.1[一般工业技术—材料科学与工程]