柔性光学聚酰亚胺薄膜折射率均匀性检测方法  

Refractive Index Homogeneity Measure Method of Flexible Optical Polyimide Film

作　　者：王松[1,2] 杨伟[1] 吴时彬[1] 任戈[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院大学,北京100049

出　　处：《光电工程》2016年第7期85-88,共4页Opto-Electronic Engineering

基　　金：国家863高技术项目支持课题

摘　　要：针对空间应用的柔性光学聚酰亚胺薄膜折射率均匀性检测要求,本文提出以干涉测量法为基础,采用光学聚酰亚胺薄膜制备所用基板的反射波前数据、薄膜未剥离成膜基板时上表面反射波前数据以及薄膜剥离基板后的透射波前数据有效测量此类柔性薄膜折射率均匀性。将棱镜耦合仪逐点测量数据作为对比项,实验结果表明,所提出的方法能高效可靠地对柔性薄膜全口径进行折射率均匀性检测。Aiming at refractive index homogeneity of space flexible optical polyimide membrane, it can be measured through reflected wavefront of the substrate for preparation of polyimide optical membrane, reflected wavefront of up-surface of the membrane before being released from substrate and the transmission wavefront after the membrane released from substrate. Compared with data measured by the prism coupling, the results show that the proposed method is efficient and reliable for refractive index homogeneity measurement of flexible membrane in fully-aperture.

关 键 词：柔性光学聚酰亚胺薄膜 折射率均匀性 波面 

分 类 号：TN247[电子电信—物理电子学]