退火温度对La_(1–x)Sr_xCo_(1–y)Fe_yO_3系薄膜NTC阻温特性的影响  

Influences of annealing temperature on the NTC resistance temperature characteristic of La_(1–x)Sr_xCo_(1–y)Fe_yO_3 thin films

作　　者：沓世我 朱佩 李振昕 付振晓 

机构地区：[1]广东风华高新科技股份有限公司新型电子元器件关键材料与工艺国家重点实验室,广东肇庆526020

出　　处：《电子元件与材料》2016年第8期33-36,共4页Electronic Components And Materials

基　　金：国家科技支撑计划课题(No.2014BAE10B01)

摘　　要：利用La_(1–x)Sr_xCo_(1–y)Fe_yO_3(x=0.2,y=0.3)陶瓷靶材,通过真空射频磁控溅射在Al_2O_3基片上制备La_(0.8)Sr_(0.2)Co_(0.7)Fe_(0.3)O_3(LSCF)薄膜,然后在此基础上制备NTC热敏电阻。采用X射线衍射(XRD)分析了材料相的组成,扫描电子显微镜(SEM)分析观察薄膜材料的微观结构,电阻测试仪和四探针仪器测试薄膜的阻温特性,研究不同退火温度对LSCF薄膜室温电阻和材料常数(B值)的影响。结果表明,随着退火温度升高,LSCF薄膜方阻和B值都存在先减小后增大现象,具有显著的NTC阻温特性,其lnR-T^(–1)曲线具有良好的线性度。La0.8Sr0.2Co0.7Fe0.3O3（LSCF） thin films were deposited on the Al2O3 substrate by RF magnetron sputtering method with La1–xSrxCo1–yFeyO3 （x=0.2, y=0.3） ceramic as the target material,and then the NTC thermistor was prepared. By using the X-ray diffraction （XRD） analysis, scanning electron microscope （SEM）, resistance tester and a four point probe instrument, the phase composition, microstructure and resistance-temperature characteristics were studied. And the effect of annealing temperature on the room temperature resistance and material costant （B value） were also disscussed. The results show that with the increasing of annealing temperature, the sheet resistance and B value of LSCF film decrease first and then increase. The obtained film has significant NTC R-T characteristic, and its lnR - T–1 curve has good linearity.

关 键 词：La0.8Sr0.2Co0.7Fe0.3O3 薄膜 射频磁控溅射 结晶性能 NTC热敏电阻 阻温特性 

分 类 号：TN37[电子电信—物理电子学]