Improved phase-shifting diffraction interferometer for microsphere topography measurements  

作　　者：刘国栋 卢丙辉 孙和义 刘炳国 陈凤东 庄志涛 

机构地区：[1]Instrument Science and Technology, Harbin Institute of Technology

出　　处：《Chinese Optics Letters》2016年第7期47-50,共4页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China under Grant Nos.61275096 and 51275120

摘　　要：In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ap- paratus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer＇s specification value.In this study, an improved phase-shi^ng diffraction interferometer for measuring the surface topography of a microsphere is developed. A common diode-pumped solid state laser is used as the light source to facilitate ap- paratus realization, and a new polarized optical arrangement is designed to filter the bias light for phase-shifting control. A pinhole diffraction self-calibration method is proposed to eliminate systematic errors introduced by optical elements. The system has an adjustable signal contrast and is suitable for testing the surface with low reflectivity. Finally, a spherical ruby probe of a coordinate measuring machine is used as an example tested by the new phase-shifting diffraction interferometer system and the WYKO scanning white light interferometer for experimental comparison. The measured region presents consistent overall topography features, and the resulting peak-to-valley value of 84.43 nm and RMS value of 18.41 nm are achieved. The average roughness coincides with the manufacturer＇s specification value.

关 键 词：Improved phase-shifting diffraction interferometer for microsphere topography measurements 

分 类 号：O436.1[机械工程—光学工程] TH744.3[理学—光学]