N_2流量对HIPIMS/DCMS共沉积制备TiAlCrN涂层结构及性能的影响  

Effect of N_2 Flow-Rate on Improvement of Mechanical Properties of TiAlCrN Composite Coatings

作　　者：贵宾华 周晖[1] 郑军[1] 张延帅[1] 杨拉毛草 

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空科学与技术学报》2016年第7期800-806,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：利用高功率磁控溅射与直流反应磁控溅射共沉积技术制备了不同N_2流量下的TiAlCrN复合硬质涂层。采用X射线衍射仪(XRD)、薄膜综合性能测试仪以及大气球盘摩擦磨损试验机分析测试了涂层的微观组织结构、力学性能及摩擦学性能。结果显示:随N_2流量的提高,涂层沉积速率先上升后下降;XRD测试表明增加N_2流量可有效抑制h-Al N相的生成,并且改善了涂层的结晶性能;同时,表面粗糙度先下降后升高,最小值可达45.7 nm;涂层硬度逐渐上升,而弹性模量在取得最大值后呈下降趋势,最大值分别为31.2和423.8 GPa;划痕临界载荷在N_2流量为250 m L/min时获得最优值5.5 N。摩擦学性能方面,随N_2流量的提高,涂层磨损率先下降后上升,最小值为2.6×10^(-17)m^3/N·m。由此可见,在一定范围内调节N_2流量可显著改善涂层的强度及耐磨损性能。The TiAlCrN composite hard coatings were synthesized by a combination of high-power impulse and dc magnetron co-sputtering. The impact of the N_2flow-rateon the phase-structure,mechanical and tribological properties of the TiAlCrN coatings was investigated X-ray diffraction and conventional mechanical probes. The results show that significantly depending on the N_2flow-rate,the TiAlCrN coatings with improved mechanical behavior can be deposited. To be specific,as the N_2flow-rate increased,the deposition rate changed in an increase-decrease mode,accompanied by an improved crystallinity because h-Al Nphase formation was effectively suppressed; the surface roughness changed in a decrease-increase way; the hardness slowly increased up to 31. 2 GPa; the elastic modulus varied in an increase-decrease manner with a peak of 423. 8 GPa; and the wear-rate changed in a decrease-increase pattern with a trough of 2. 6 × 10^（-17）m^3/ N·m. The critical load reached 5. 5 N at a N_2flow-rate of 250 m L /min.

关 键 词：高功率磁控溅射/直流反应磁控溅射共沉积 N2流量 微观组织结构 力学性能 摩擦学性能 

分 类 号：TB43[一般工业技术]