基于输入整形器的公转电机振动抑制  

Restrain the Vibration of Revolution-Motor Based on Input Shaper

作　　者：韩记晓 张常江[1] 万勇利 刘洋[1] 陈兴林[1] 

机构地区：[1]哈尔滨工业大学航天学院,黑龙江哈尔滨150001

出　　处：《自动化技术与应用》2016年第7期73-76,共4页Techniques of Automation and Applications

基　　金：国家极大规模集成电路制造装备与成套工艺的国家重大科技专项(编号2009ZX02207))

摘　　要：光刻机是超高精度控制系统,需要实现纳米级的运动与定位精度。而在光刻系统的换台过程中,公转电机处于核心位置,对其性能要求比较高,我们常用定位速度以及精度这些指标来衡量它的性能。但由于运动过程中,公转电机在快速定位时总会产生振动,从而影响其定位速度及精度。因此本文针对双工件台换台过程中公转电机的残留振荡,提出了一种基于粒子群优化算法的输入整形器,来提高公转电机的定位速度和精度,从而优化换台时间,缩短光刻机的硅片生产时间。Lithography machine is an ultra high accuracy control system, which needs to realize nanoscale motion and positioning accuracy. In the process of exchanging platform, the revolution-motor occupies the core position. There is a high performance requirement for it, usually positioning speed and accuracy are used to measure the performance of it. But in the process of movement, the revolultion motor always produces vibration when quick positioning. So the positioning speed and accuracy are influenced. This paper puts forward input shaper based on the particle swarm optimization algorithm aims at the vibration produced by the revolution motor in the process of exchanging. Through this algorithm the positioning speed and accuracy of the revolution-motor can be improved, then the time of exchanging to increase the productivity is reduced.

关 键 词：公转电机 输入整形器 粒子群优化算法 

分 类 号：TP13[自动化与计算机技术—控制理论与控制工程]