利用相位差异波前传感检测结果实现三反光学系统的辅助装调  

Realizing Assisted Alignment of Three-Mirror Reflecting Optical System by Using Wavefront Sensing Test Results of Phase Diversity

作　　者：程强[1,2] 薛栋林[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院光学系统先进制造技术重点实验室,吉林长春130033

出　　处：《光学学报》2016年第7期123-130,共8页Acta Optica Sinica

基　　金：国家自然科学基金(61036015);国家973计划(2011CB0132005)

摘　　要：阐述了基于相位差异(PD)的波前传感技术的基本原理;仿真分析了PD技术的噪声适应性及探测器离焦误差对精度的影响;利用PD技术的波前传感结果分别辅助装调了离轴、同轴三反光学系统,并分别将多视场的波前图与干涉检验的结果进行对比。实验结果表明,利用PD技术可实现三反光学系统的波前传感及辅助装调。与干涉检验的结果相比,波前传感结果的RMS偏差均优于0.02λ,检测精度满足工程需求。The basic principles of wavefront sensing technology based on phase diversity（PD）are discussed.The noise adaptability of the PD technique and the influence of the detector defocus distances error on the accuracy are analyzed.PD technology is applied to assisted align off-axis and coaxial three-mirror reflecting optical system,and the wavefront maps of multiple fields of view are compared with interferometric test results.Experimental results show that wavefront sensing and assisted alignment of three-mirror reflecting optical system can be realized by using PD technology.Compared with the results of interferometric test,results of wavefront sensing are all better than0.02λ RMS.The accuracy can satisfy the requirement of engineering.

关 键 词：成像系统 相位差异 波前传感 离轴三反光学系统 同轴三反光学系统 辅助装调 

分 类 号：O439[机械工程—光学工程]