高灵敏巨磁阻抗小型磁传感器研制  

Research and fabrication of high sensitivity GMI miniaturized magnetic sensor

作　　者：黄敬晖[1] 郝洁[1] 张延松[1] 唐家耘[1] 钱坤明[1] 丁昂[1] 

机构地区：[1]中国兵器科学研究院宁波分院,浙江宁波315000

出　　处：《传感器与微系统》2016年第8期84-86,共3页Transducer and Microsystem Technologies

摘　　要：利用单辊快淬法制备了Co Fe Ni Si B非晶薄带,经过400 A/mm2电流密度、20 ms脉冲间隔条件下的脉冲退火后具有较好的弱磁场灵敏性能。以该带材为磁敏材料,基于纵向驱动方式研制了一种巨磁阻抗(GMI)磁传感器,该磁传感器尺寸小、灵敏度高、频率响应好,±0.05 m T弱磁场范围内灵敏度可达到44.15 V/m T,在高灵敏度小型磁传感器领域具有较大的应用潜力。Co Fe Ni Si B amorphous ribbons prepared by single-roll rapid quenching had high sensitivity in weak magnetic filed after pulse annealing with current density of 400 A / mm2 and pulse separation of 20 ms. The ribbons are used as magnetic sensitive materials to produce a kind of giant magnetic impedance（ GMI） magnetic sensors based on longitudinal drive mode. The magnetic senors are characterized by small size,high sensitivity,and good frequency response,and their sensitivity can reach 44. 15 V / m T in weak magnetic field of ± 0. 05 m T,it has a great potential application for high sensitivity miniaturized magnetic sensors.

关 键 词：巨磁阻抗 磁传感器 钴基非晶条带 灵敏度 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]