聚酯改性硅漆与硅半导体界面带电规律的研究  

Study of the interface charge between SP and silicon semiconductor

作　　者：李仰平[1] 李子叶[1] 唐恕[1] 王铮[1] 

机构地区：[1]西安交通大学电力设备电气绝缘国家重点实验室,陕西西安710049

出　　处：《绝缘材料》2002年第4期34-36,共3页Insulating Materials

摘　　要：研究电介质与半导体之间的接触带电、带电规律和带电控制 ,可有效地控制电力电子器件表面绝缘保护材料与半导体表面相互作用而形成的不同界面态和界面电荷 ,优化台面型电力电子器件表面空间电荷区宽度、表面电场分布 ,提高表面耐压。对加入不同填料的聚酯改性硅漆 (SP) ,测量其与表面氧化和表面钝化的n型和p型硅片接触后表面带电极性和带电量 ,得出一个接触带电序列。接触带电序列表明 ,绝缘保护材料与各种硅片的接触 ,实质上是保护材料与硅片表面物质的接触 ,与硅片的类型和内部结构无关。The interface state and charge, which is caused by the semiconductor's contacting with the insulation coating on the surface of the power electronic devices , can be controlled effectively through the study of the contact charge , law of charge and control of the charge between the dielectric and the semiconductor . The width and distribution of power electronic devices' surface space charge region can be optimized , then the surface withstand voltage increases . For the silicone polyester ( SP ) coating added different fillers , the surface charge's polarity and quantity were measured after contacting with n and p type silicon chips , which have been oxygenized and passivated , the contact charge sequence can be obtained . The sequence indicates that the contact between insulation coating and different silicon chip is , in fact , that the contact between the protective coating and the matter of surface , has no relation with the structure inside the chip and the type .

关 键 词：聚酯改性硅漆 硅半导体界面 带电规律 绝缘材料 电力电子器件 

分 类 号：TM251.4[一般工业技术—材料科学与工程] TN303[电气工程—电工理论与新技术]